Experience ultimate resolution
The new TESCAN SEM column Triglav™ delivers a unique combination of immersion optics and crossover-free mode for UHR imaging at low energies. The single-pole type objective lens creates a magnetic field around the sample and dramatically decreases optical aberrations. Avoiding any crossover in the column reduces the Boersch effect and further optimizes the electron beam to yield superior resolution. Surface details of the specimen can be captured more reliably than ever before. For analysis, the TriLens™ technology improves resolution in the magnetic-field-free mode.
- TriLens™: Objective based on the advantageous complementarity of three lenses that enables multiple imaging modes
- Unique combination of UH-resolution lens with crossover free mode for superb ultra-high resolution: 1 nm at 1 keV
- TriSE™: Three SE detectors to capture the finest surface details
- TriBE™: Three BSE detectors for angle-selective compositional contrast
- EquiPower™: Excellent column stability ideal for time-consuming applications such as FIB-SEM tomography
|In-Beam SE||0.7 nm at 15 keV|
|SE (BDM)||1.0 nm at 1 keV|
|STEM||0.7 nm at 30 keV|
Models with the new Triglav™ UHR column technology
Three lenses, various imaging modes
The TriLens™ objective system is based on the advantageous complementarity of three objective lenses: an UH-resolution lens (60° immersion lens), an Analytical lens and an Intermediate lens (IML). The combination of these lenses results in different working imaging modes.
- UH-RESOLUTION mode
This mode is achieved by the unique combination of immersion optics and crossover-free mode for ultra-high resolution imaging at low energies. Avoiding any crossover in the column reduces the Boersch effect and further optimizes the electron beam to yield superior resolution of 1 nm at 1 keV. UHR is ideal for failure analysis in semiconductors, research and characterisation of nanomaterials, non-conductive and very sensitive samples.
- ANALYSIS mode
This mode is implemented by means of an Analytical lens. It is well suited for analysis such as EDS and EBSD, as well as simultaneous SEM imaging during FIB operations such as cross-sectioning and FIB-SEM tomography. High-quality imaging of highly topographic magnetic specimens is possible.
- DEPTH mode
The UH-resolution lens can be used in combination with the IML lens which allows for increasing the probe current while maintaining excellent resolution and enabling large depth of focus. This further extends the analytical capabilities and enables imaging of sensitive samples with high topography.
- OVERVIEW mode
The IML enables a wide field of view.
TriLens™ objective system. (a) IML (b) Analytical lens
Resolution test: Au particles on C imaged at 50 eV with the SE (BDM) detector in the UH-RESOLUTION mode (field of view 1 µm).
TriSETM + TriBETM
Universal detection system
See even more with the advanced Triglav™ detection system involving several high-efficiency detectors in the column as well as in the chamber for secondary, back-scattered and transmitted electrons.
- TriSE™ – triple SE detection – gives a nearly noise-free comprehensive description of sample topography and allows the capture of the finest surface details. Each working mode – whether for ultra-high resolution, analysis or beam deceleration – is equipped with a dedicated SE detector placed in an ideal position with appropriate signal guiding electrodes.
- TriBE™ – triple BSE detection – is used to distinguish BSE take-off angles and provides comprehensive information about material composition. A retractable In-Chamber BSE detector placed between the sample and the pole-piece provides both topographic and compositional contrast (from wide-angle electrons) suitable for observation of low-contrast samples. Mid-Angle BSE detector inside the column allows low-noise volume compositional mapping. In-Beam BSE detector captures true compositional information due to pure surface material contrast from axial backscattered electrons.
See true sample topography. (a) BDM, (b) UH RESOLUTION and (c) ANALYSIS modes have their own dedicated detectors in ideal positions to capture fine surface details of the specimen.
The sophisticated geometry of detector arrangement enables distinguishing
TriSETM – Unique Triple SE detector system
- In-Chamber SE
For topographical contrast.
- In-Beam SE
For ultra-high resolution and maximum surface sensitivity.
- SE (BDM)
For ultimate imaging in the beam deceleration mode (BDM).
TriBETM - Unique Triple BSE detection system
- In-Chamber BSE (retractable) - For wide-angle BSE detection which provides mainly topographical but also compositional contrast, especially suited for low-contrast samples (e.g. polished samples).
- Mid-angle BSE - For medium-angle BSE signal detection which is ideal for imaging at very small WD providing mainly compositional but also topographical contrast.
- In-Beam BSE - For axial BSE detection which provides pure surface elemental contrast and best suited for small WD.
The column excels throughout the entire range of accelerating voltages, however, the highlight is the ultimate resolution at low beam energies which makes this new column ideal for imaging beam-sensitive materials such as:
- low-k dielectric materials
- nonconductive materials
- uncoated biological specimens
SiN with Ag contact imaged at 5 keV with: In-Chamber SE detector which delivers excellent topographic contrast and it is less sensitive to charging In-Beam SE detector for ultimate resolution In-chamber BSE detector for collecting low angle BSE giving topographic and material contrast Mid-Angle BSE detector for material contrast from the whole interaction volume In-Beam BSE detector for collecting high angle BSE for material contrast of outermost surface layers.
Beam Deceleration Mode
When the beam deceleration mode (BDM) is enabled, the detection system allows for distinguishing between the SE and BSE signals and therefore simultaneous acquisition of both. In this mode, ultimate resolution at low landing energies is achieved for maximum surface sensitivity and outstanding topographical and elemental contrast.
The detection system allows for the simultaneous acquisition of SE and BSE signals in the beam deceleration mode (BDM). (a) The SE (BDM) detector. (b) BSE (BDM) detector. (c) Biased sample.
Tin balls on carbon imaged in the BDM at 1 keV using the SE (BDM) detector providing topographic information with typical edge effect.
Tin balls on carbon imaged in the BDM at 1 keV using the BSE (BDM) detector giving a compositional information.