The VEGA 3 XM belongs to the VEGA series of scanning electron microscopes. This instrument can be configured with a Lab6 or tungsten heated cathode and is a state of the art, large chamber, research grade SEM that can address a wide range of applications. This instrument excels with handling large samples and analytical flexibility is required.
| SEM Column | |||
| Electron Gun | tungsten heated filament / optionally LaB6 | ||
| Resolution (SE) |
3 nm at 30 kV / 2 nm at 30 kV (LaB6) 8 nm at 3 kV / 5 nm at 3 kV (LaB6) | ||
| Resolution Low Vacuum (BSE) | 3.5 nm at 30 kV / 2.5 nm at 30 kV (LaB6) | ||
| Accelerating Voltage | 200 V to 30 kV | ||
| Probe Current | 1pA to 2μA | ||
| Chamber | |||
| Internal size |
300 mm (width) x 330 mm (depth) | ||
| Door |
280 mm (width) x 310 mm (height) | ||
| Number of ports |
12+ | ||
| Chamber suspension |
pneumatic or optionally active vibration isolation | ||
| Working Vacuum | |||
| High vacuum mode |
< 9 × 10-3 Pa | ||
| Medium vacuum (XMU) |
3 – 150 Pa | ||
| Low vacuum mode (XMU) |
3 – 500 Pa (optionally up to 2000 Pa) | ||
| Option (XMU) |
Water Vapor Inlet | ||
| Stage | |||
| Type | compucentric | ||
| Movements |
Fully motorized: X = 130 mm Y = 130 mm Z = 100 mm Rotation: 360˚ continuous Tilt: -30˚ to +90˚ | ||
| Specimen height |
maximum 145 mm | ||
