VEGA 3 Scanning Electron Microscopes

New Generation of Vega SEMs

Key features of the VEGA 3 Generation

• New high-performance electronics for faster image acquisition and signal processing
• A new ultra-fast scanning system with compensated static and dynamic image aberrations
• An extended range of scanning modes using the original Wide Field Optics™
• Tescan's unique In-Flight Beam Tracing™ for real-time beam optimization
• Redesigned software control with high level of automation
  
• Built-in scripting for user-defined applications

Modern Optics

• A unique four-lens Wide Field Optics™ design offering a variety of working and displaying modes.
• The proprietary Intermediate Lens (IML) that works as an "aperture changer" making the exchange of the effective final aperture electromagnetically.
• Usage of premium materials for the lenses and coils allows an ultra-fast imaging rate down to 20 ns/pixel with minimized dynamic distortion effects.
• Newly implemented In-Flight Beam Tracing™ for high precision real-time computation of optical parameters
• The column design, without any mechanical centering elements, allows fully automated column set-up and alignment.
• Unique live stereoscopic imaging, using the advanced 3D Beam Technology, opens the 3D experience to the micro and nano-world.

Analytical Potential

• Best-in-class analytical WD flexibility
• First class YAG scintillator based detectors
• A comprehensive choice of optional detectors and accessories
• Chamber interface ports are optimized for micro-analytical use
• Obtaining the clean chamber vacuum by a powerful turbomolecular and rotary fore vacuum pumps within a few minutes.
• Investigation of non-conductive samples in the variable pressure versions.
• Several options of chamber suspension type ensures effective reduction of ambient vibrations in your lab.
• 3D measurements on a reconstructed surface utilizing the 3D metrology software

VEGA 3 Models:

Two Types of the Vacuum System are Offered:

• VEGA HiVac – Conventional model operating at a high vacuum of approximately 10^-3 Pa.
• VEGA UniVac– Variable pressure SEM, that combines the advantages of the high vacuum model with extended facility for low vacuum operation. In low vacuum mode, non-conductive specimens can be examined in their natural, uncoated state, using all working modes of the optical system at pressures up to150 Pa and in Resolution and Depth mode at pressures up to 500 Pa (operation at chamber pressures up to 2000 Pa optionally available). 

VEGA HiVac - High Vacuum Models 

• VEGA 3 SBH - small chamber, semi-motorized stage, mechanical suspension
• VEGA 3 LMH - large chamber, extended motorized stage, pneumatic or active isolation
• VEGA 3 XMH - extra large chamber, motorized stage with extra large movements, pneumatic or active isolation
  

VEGA UniVac - Variable Pressure Models 

• VEGA 3 SBU - small chamber, semi-motorized stage, mechanical suspension, univac
•  VEGA 3 LMU - large chamber, extended motorized stage,  pneumatic or active isolation, univac 
• VEGA 3 XMU - extra large chamber, extended motorized stage, pneumatic or active isolation, univac
  

Wide Field Optics™ is a trademark of TESCAN, a.s.