The VEGA 3 SB belongs to the VEGA series of scanning electron microscopes. This instrument is configured with a tungsten heated cathode and is a state of the art, workhorse SEM that can address a wide range of applications.
| SEM Column | |||
| Electron Gun |
Tungsten heated filament | ||
| Resolution (SE) |
3 nm at 30 kV 8 nm at 3 kV | ||
| Resolution - Low Vacuum (BSE, LVSTD) |
3.5 nm at 30kV | ||
| Accelerating Voltage |
200 V to 30 kV | ||
| Probe Current |
1 pA to 2μA | ||
| Chamber | |||
| Internal diameter |
160 mm | ||
| Door width | 120 mm | ||
| Number of ports |
10 | ||
| Chamber suspension |
mechanic | ||
| Working Vacuum | |||
| High vacuum mode |
< 9 × 10-3 Pa | ||
| Medium vacuum (SBU) |
3 – 150 Pa | ||
| Low vacuum (SBU) |
3 – 500 Pa | ||
| Stage | |||
| Type | eucentric | ||
| Movements |
X = 45 mm – motorized Y = 45 mm – motorized Z = 27 mm – manual Z" = 6 mm – manual Rotation: 360˚ continuous – motorized Tilt: -90˚ to + 90˚ eucentrical – manual | ||
| Specimen height |
maximum 36 mm | ||
| EasyEDX Microanalyser | |||
| Detector type | SDD Detector | ||
| Detector cooling | Peltier couple (LN2 free) | ||
| Energy Resolution |
133 eV (Mn Ka) at 100 kcps | ||
| Max. input count rate |
150 kcps | ||
| Detection range |
from B(5) to Am(95) | ||
