TESCAN USA - Value and Excellence in SEMs

VEGA 3 LM - Scanning Electron Microscope

VEGA 3 LM Technical features:

The VEGA 3 LM belongs to the VEGA series of scanning electron microscopes. This instrument can be configured with a Lab6 or tungsten heated cathode and is a state of the art, research grade SEM that can address a wide range of applications. This instrument excels when analytical flexibility is required.

Modern Electron Optic Design

A unique four-lens Wide Field Optics™ design offering a variety of working and displaying modes.
The proprietary Intermediate Lens (IML) that functionally creates a continuously adjustable aperature which does not require any mechanical adjustment.
The use of advanced materials for our lenses and coils allows for an ultra-fast imaging rate down to 20 ns/pixel with minimized static and dynamic distortion effects.
In-Flight Beam Tracing™ for high precision real-time computation of optical parameters.
A column design with no mechanical centering elements, allowing fully automated column set-up and alignment, delivering uncompromised ease of use.
Live stereoscopic imaging, using our advanced 3D Beam Technology, opening the micro and nano-world for 3D imaging and metrology.
An imaging system that allows acquisition of 16K X 16K pixel images with 16 bit pixels.

Chamber and Plinth Design

A large chamber with an extended 5 axes fully motorized compucentric stage
11 chamber interface ports with optimized analytical geometry and best in class flexibility for EDX, WDX and EBSD
Fast imaging rates due to first class YAG-based detectors
A choice of fully integrated composite damping, pneumatic or optional active vibration isolation, ensuring the best protection in poor environments, reducing the influence of ambient vibration
A comprehensive choice of optional detectors and accessories
Oil free high vacuum design utilizing a turbo molecular pump.

Detectors

YAG-based Backscattered Detectors for excellent durability, high speed imaging and excellent signal to noise ratio.
Multiple Diode Backscattered Detector
YAG-based Secondary Electron detector for long lifetime, excellent signal to noise ratio and durability
Low Vacuum Secondary Electron Detector for Variable Pressure imaging.
Optimized CCD cameras for assisting in sample navigation
TESCAN Cathodoluminesence Detectors, Optimized for visible light wavelengths or wideband operation, providing complimentary chemical information

Software and Automated Analysis

High precision stage suitable for demanding applications in automated analysis
3D metrology software for Height, Surface and Profile surface measurements
Correlative Microscopy
Communication with third party products via TCP/IP interface (e.g. automated EDX analysis)
Software extensions for Particle and Mineral Analysis, large area imaging and morphology analysis
Software customization
Built-in scripting for user defined applications
Built-in image management and report generation
Multi-user environment is localized in many languages
User and Accounting software for tracking of users in multi user environments.
Two Graphical User Interfaces, including an EasySEM mode for novice users
Built-in remote access/diagnostics for post sales support

VEGA 3 LM Models:

VEGA 3 LMH

A dedicated high vacuum scanning electron microscope, suitable for a wide range of applications, where conductive samples are investigated.

VEGA 3 LMU

A variable pressure variant that supplements all the advantages of the high vacuum model with extended facility for low vacuum operation. This allows investigation of non-conductive materials in their natural uncoated state.

Specification of selected parameters VEGA 3 LM:

SEM Column
Electron Gun	Tungsten heated filament / optionally LaB₆
Resolution (SE)	3 nm at 30 kV / 2 nm at 30 kV (LaB₆) 8 nm at 3 kV / 5 nm at 3 kV (LaB₆)
Resolution - Low Vacuum (BSE, LVSTD)	3.5 nm at 30kV / 2.5 nm at 30 kV (LaB₆)
Accelerating Voltage	200 V to 30 kV
Probe Current	1 pA to 2μA
Scanning speed	20ns to 10ms / pixel

Chamber
Internal diameter	230 mm
Door width	148 mm
Number of ports	11⁺
Chamber suspension	Standard: - pneumatic Options: - mechanical - active vibration isolation

Working Vacuum
High vacuum mode	< 9 × 10^-3 Pa
Medium Vacuum (LMU)	3 – 150 Pa
Low vacuum mode (LMU)	3 – 500 Pa (optionally up to 2000 Pa)
Option (LMU)	Water Vapor Inlet

Stage
Type	compucentric
Movements	Fully motorized: X = 80 mm, Y = 60 mm, Z = 47 mm Rotation: 360˚ continuous Tilt: -80˚ to + 80˚ * * - WD dependent
Specimen height	maximum 81 mm
Stage X x Y Range Options	40x40 mm; 60x60 mm

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