MIRA3 XM

The Most Important Features of the MIRA3 XM

High Performance FESEM

A high brightness Schottky emitter for high-resolution/ high-current/low-noise imaging
A powerful In-Beam Detector for high resolution imaging especially at low accelerating voltages

Unique Electron Optics

A unique three-lens Wide Field Optics™ design offers a variety of working and displaying modes.
The proprietary Intermediate Lens (IML) that works as an „Aperture Changer“ makes the exchange of the effective final aperture in an electromagnetic way.
The column construction, without any mechanical centering elements, allows fully automated column set-up and alignment
Real time In-Flight Beam Tracing™ for the performance and beam optimization integrating the well established software Electron Optical Design. It includes also direct and continual control of beam spot size and beam current
Unique live stereoscopic imaging an 3D surface recontruction utilizing the 3D Beam technology
Fast imaging rate up to 20 ns/pixel

Analytical Potential

An extra large chamber is able to accommodate specimens with the diameter of about 250 mm
A robust 5-axis motorized stage is capable of holding large and heavy samples
12⁺ chamber interface ports with optimized analytical geometry for EDX and EBSD
Fast imaging rates due to first class YAG-based detectors
A comprehensive range of optional detectors and accessories
3D measurements on a reconstructed surface utilising the 3D metrology software
Integrated pneumatic or optional active vibration isolation for ambient vibration reduction

Automated Analysis

The fast and accurate computer controlled stage is suitable for different applications in automated analysis
Comunication with external software or third party products via TCP/IP interface (e.g. automated EDX analysis)
High-throughput large-area automation, e.g. automated particle location and analysis

Sophisticated Control

A fully automated microscope set-up including electron optics set-up and alignment
Sophisticated software for SEM control, image acquisition, archiving, processing and analysis
Multi-user environment localized in many languages
Three levels of user rights, including an EasySEM™ mode for inexperienced users
Built-in image management and report creation
Network operations and built-in remote access/diagnostics
System built in self-diagnostics

MIRA3 XM Variants

MIRA3 XMH

A high vacuum model is suitable for a wide range of applications where extra large conductive samples are investigated.

MIRA3 XMU

A variable pressure variant that supplements all the advantages of the high vacuum model with extended facility for low vacuum operations. This allows investigation of non-conductive materials in their natural uncoated state.

Specification of selected parameters MIRA3 XM:

SEM Column
Electron Gun	High brightness Schottky Emitter
Resolution (In-Beam SE)	1.0 nm at 30 kV 2.0 nm at 3 kV
Resolution (SE-ET)	1.2 nm at 30kV 2.5 nm at 3 kV
Resolution in high/low vacuum mode (BSE)	2.0 nm at 30 kV
Magnification	2x - 1,000,000x
Accelerating Voltage	200 V to 30 kV
Probe Current	2 pA to 100 nA

Chamber
Internal dimensions	300 mm (width) x 330 mm (depth)
Door	280 mm (width) x 310 mm (height)
Number of ports	12⁺
Chamber suspension	pneumatic or optionally active vibration isolation

Working Vacuum
Gun Vacuum	< 3 x 10 ^-7 Pa
Chamber Vacuum - High vacuum mode	< 9 × 10^-3 Pa
Chamber - Low Vacuum Mode (XMU)	7–150 Pa

Stage
Type	compucentric
Movements	Fully motorized: X = 130 mm Y = 130 mm Z = 100 mm Rotation: 360˚ continuous Tilt: -30˚ to +90˚
Specimen height	maximum 145 mm

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Product Focus

TIMA

The TESCAN Integrated Mineral Analyzer (TIMA) is a new SEM-based automated mineralogy solution for the mining and minerals processing industries. TIMA measures mineral abundance, size by size liberation, mineral association, grain size and PGM search automatically on multiple samples of grain mounts, thin sections or polished sections. Applications include ore characterization, process optimization, remediation and the search for precious metals and rare earths.

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