MIRA3 LM

The Most Important Features of the MIRA3 LM

High Performance FESEM

A high brightness Schottky emitter for high-resolution/ high-current/low-noise imaging
A powerful In-Beam Detector for high resolution imaging especially at low accelerating voltages optionally available

Modern Electron Optics

A unique three-lens Wide Field Optics design offers a variety of working and displaying modes.
The proprietary Intermediate Lens (IML) that works as an „Aperture Changer“ makes the exchange of the effective final aperture in an electromagnetic way.
The column construction, without any mechanical centering elements, allows fully automated column set-up and alignment
Real time In-Flight Beam Tracing™ for the performance and beam optimization integrating the well established software Electron Optical Design. It includes also direct and continual control of beam spot size and beam current
Unique live stereoscopic imaging an 3D surface reconstruction utilizing the 3D Beam technology
Fast imaging rate up to 20 ns/pixel

Analytical Potential

A large chamber with 5 axes motorized compucentric stage
Fast imaging rates due to first class YAG-based detectors
11⁺ chamber interface ports with optimized geometry for EDX, WDX, EBSD
Integrated pneumatic or optional active vibration isolation for ambient vibration reduction

Automated Analysis

The fast and accurate computer controlled stage is suitable for different applications in automated analysis
Communication with external software or third party products via TCP/IP interface (e.g. automated EDX analysis)
High-throughput large-area automation, e.g. automated particle location and analysis

Sophisticated Control

A fully automated microscope set-up including electron optics set-up and alignment
Sophisticated software for SEM control, image acquisition, archiving, processing and analysis
Multi-user environment localized in many languages
Three levels of user expertise, including an EasySEM mode for inexperienced users
Built-in image management and report creation
Network operations and built-in remote access/diagnostics
System built in self-diagnostics

Specification of selected parameters MIRA3 LM:

SEM Column
Electron Gun	High brightness Schottky Emitter
Resolution (In-Beam SE)	1 nm at 30 kV 2 nm at 3 kV
Resolution (SE-ET)	1.2 nm at 30kV 2.5 nm at 3 kV
Resolution Low Vacuum (LVSTD)	1.5 nm at 30 kV 3 nm at 3kV
Magnification	3.5x to 1,000,000x
Accelerating Voltage	200 V to 30 kV
Probe Current	2 pA to 100 nA

Chamber
Internal diameter	230 mm
Door width	148 mm
Number of ports	11⁺
Chamber suspension	pneumatic or optionally active vibration isolation

Working Vacuum
High vacuum mode	< 9 × 10^-3 Pa
Low vacuum mode (LMU)	7–150 Pa

Stage
Type	compucentric
Movements	Fully motorized: X = 80 mm, Y = 60 mm, Z = 47 mm Rotation: 360˚ continuous Tilt: -80˚ to + 80˚ * * - range depends on WD and detector configuration
Specimen height	maximum 81 mm

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Product Focus

TIMA

The TESCAN Integrated Mineral Analyzer (TIMA) is a new SEM-based automated mineralogy solution for the mining and minerals processing industries. TIMA measures mineral abundance, size by size liberation, mineral association, grain size and PGM search automatically on multiple samples of grain mounts, thin sections or polished sections. Applications include ore characterization, process optimization, remediation and the search for precious metals and rare earths.

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