MIRA 3 FEG SEM

New Generation of High Resolution FEG SEMs

The MIRA 3 is a  third generation of MIRA series of high resolution scanning electron microscopes equipped with a high brightness Schottky Field Emission gun.

Key features of the MIRA 3 Generation

• A new high-performance electronics for faster image acquisition and signal processing
• New generation ultra-fast scanning system with compensated static and dynamic image aberrations
• An extended range of scanning modes using the original Wide Field Optics™
• Software control and high level of automation
• New generation of integrated nano-lithography toolbox
  
• Built-in scripting for user defined applications

Modern Electron Optics

• High brightness Schottky emitter for high-resolution / high-current / low-noise imaging
• Original In-Beam Detector, for high resolution imaging at low accelerating voltages optionally available
  
• Unique three-lens Wide Field Optics™design offering the variety of working and displaying modes
• The proprietary Intermediate Lens (IML) that works as an "aperture changer" makes the exchange of the effective final aperture electromagnetically.
• Usage of premium materials for the lenses and coils allows an ultra-fast imaging rate down to 20 ns/pixel with minimized dynamic distortion effects.
• Real time In-Flight Beam Tracing™ for the performance and spot optimization integrating the well established software Electron Optical Design
• The column design, without any mechanical centering elements, allows fully automated column set-up and alignment.
• Unique live stereoscopic imaging, using the advanced 3D Beam Technology, opens the micro and nano-world for amazing 3D experience and 3D navigation.

Great Analytical Potential

• First class YAG scintillator based detectors
• A comprehensive choice of optional detectors and accessories
• Chamber interface ports are optimized for micro-analytical use 
• Optional Active Vibration Isolation is fully integrated in the microscope frame for efficient cancelling of ambient vibration
• Obtaining the clean chamber vacuum by a powerful turbomolecular and rotary fore vacuum pumps within a few minutes.
• Investigation of non-conductive samples in the variable pressure versions.
• Several options of chamber suspension type ensures effective reduction of ambient vibrations in your lab.
• 3D measurements on a reconstructed surface utilizing the optional 3D metrology (MeX) software

User Friendly Software

• Sophisticated software for SEM control, image acquisition, archiving, processing and analysis.
  
• Multi-user environment is localized in many languages.
• Comprehensive choice of plug-in modules for different applications
  
• High-throughput large-area automation, e.g. automated particle location and analyses with fully motorized compucentric stages
• Fully automated microscope set-up including electron optics set-up and alignment
• Network operations and built-in remote access/diagnostics, all come as  Tescan standard.

MIRA 3 Models

The extraordinary FEG SEM MIRA 3 is available in two vacuum versions and with two chamber sizes.

MIRA 3 HiVac

• MIRA 3 LMH - large chamber, high vacuum
• MIRA 3 XMH - extra large chamber, high vacuum

MIRA 3 UniVac

• MIRA 3 LMU - large chamber, uni-vacuum
• MIRA 3 XMU - extra large chamber, uni-vacuum

Wide Field Optics™ and In-Flight Beam Tracing™ are trademarks of TESCAN, a.s.
We are constantly improving the performance of our products, so all specifications are subject to change without notice.