LYRA3 XM

FEG-SEM Specific Features

High brightness Schottky emitter for high-resolution / high-current / low-noise imaging
Unique three-lens Wide Field Optics™design offering the variety of working and displaying modes embodying the Tescan proprietary Intermediate Lens for the beam aperture optimization
Real time In-Flight Beam Tracing™ for the performance and beam optimization integrating the well established software Electron Optical Design. It includes also direct and continual control of beam spot size and beam current. More about Electron Optical Design here
Fast imaging rate with Tescan first class YAG-based detectors
Fully automated microscope set-up including electron optics set-up and alignment

FIB Specific Features

Unique ion optic column differentially pumped, with 2 ion pumps, for ultra-low ion scattering effect
Motorized aperture changer with ultra-high reproducibility
Beam Blanker and Faraday cup included as a standard
Simultaneous SEM imaging with FIB etching or deposition
FIB control is fully integrated in the SEM software
Powerful toolbox for basic shapes creation with programmable process parameters

GIS Option Features

Ideal geometrical configuration with respect to SEM and FIB columns
5 independent gas reservoirs with capillaries or optionally up to 3 individual "MonoGIS" systems
3-axis microstage with automatic nozzles positioning
Automated temperature control

Specification of selected parameters LYRA3 XM:

SEM Column
Electron Gun	High brightness Schottky Emitter
Resolution (SE)	1.2 nm at 30 kV
Accelerating Voltage	200 V to 30 kV
Probe Current	2 pA to 100 nA
Magnification	2x - 1,000,000x

FIB Column
Ion Gun	Ga liquid metal ion source
Resolution (SE)	< 5 nm at 30 kV
Gun Vacuum	< 5 × 10^-6 Pa
Magnification	150x to 1,000,000x
Accelerating Voltage	0.5 kV to 30 kV
Probe Current	1 pA to 40 nA

Chamber
Internal diameter	300 mm (width) x 330 mm (depth)
Door Size	280 mm (width) x 310 mm (height)
Number of ports	13⁺
Chamber suspension	active vibration isolation

Stage
Type	5-axis fully motorized, compucentric
Movements	X = 130 mm Y = 130 mm Z = 100 mm Rot.: 360° continuous Tilt: -30° to +90°
Maximum Specimen Height	139 mm

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Product Focus

TIMA

The TESCAN Integrated Mineral Analyzer (TIMA) is a new SEM-based automated mineralogy solution for the mining and minerals processing industries. TIMA measures mineral abundance, size by size liberation, mineral association, grain size and PGM search automatically on multiple samples of grain mounts, thin sections or polished sections. Applications include ore characterization, process optimization, remediation and the search for precious metals and rare earths.

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