INDUSEM

The INDUSEM is a new model of a scanning electron microscope intended for industrial applications. The system is based on a platform of the third generation of VEGA SEMs built-in a robust frame. This compact and transportable device equipped with an extra large chamber enables wide sample range for quality control and failure analysis within production plant.

Let the SEM Work for You

User can take an advantage of high-performance system for quick sample evaluation, optionally with elemental EDX microanalysis, all available from EasySEM™software interface. Device control is powered by numerous automated functions with possibility to create user-defined fully automated procedures.

Characteristic Features of the InduSEM

Industrial Design

Compact design with a wheeled chassis for routine transport
Extra large chamber with robust manipulator is able to accommodate large and heavy specimens
Variable pressure vacuum system allows investigation of different samples, including non-conductive materials
Easy-to-use touchscreen control interface for routine sample evaluation
Active vibration isolation greatly reduces ambient vibration

Modern Optics

The column design allows fully automated column set-up and alignment without any mechanical adjustments
A unique four-lens Wide Field Optics™ design offering a variety of working and displaying modes.
The proprietary Intermediate Lens (IML) that works as an "aperture changer" makes the exchange of the effective final aperture electromagnetically.
Usage of premium materials for the lenses and coils allows an ultra-fast imaging rate down to 20 ns/pixel with minimized dynamic distortion effects.
Newly Implemented In-Flight Beam Tracing™ for higher system performance and beam optimization

Analytical Potential

First class YAG scintillator based detectors
A comprehensive choice of optional detectors and accessories
Chamber interface ports are optimized for micro-analytical use
Obtaining the clean chamber vacuum by a powerful turbomolecular and rotary fore vacuum pumps within a few minutes

Automation Enabled

Design of the system enables full software control and needs no mechanical adjustment
Range of automated procedures supports automated operation, setup and alignment
Optional software extension for automated particle analysis, large area observation
Built-in scripting language (Python) enables access to all control functions and allows building a user-defined fully automated procedures

Specification of selected parameters of InduSEM:

SEM Column
Electron Gun	tungsten heated filament
Resolution (SE)	3 nm at 30 kV 8 nm at 3 kV
Resolution Low Vacuum (BSE)	3.5 nm at 30 kV
Accelerating Voltage	200 V to 30 kV
Probe Current	1pA to 2μA

Chamber
Internal size	300 mm (width) x 330 mm (depth)
Door	280 mm (width) x 310 mm (height)
Number of ports	12⁺
Chamber suspension	active vibration isolation

Working Vacuum
High vacuum mode	< 9 × 10^-3 Pa
Medium vacuum	3 – 150 Pa
Low vacuum mode	3 – 500 Pa

Stage
Type	compucentric
Movements	Fully motorized: X = 130 mm Y = 130 mm Z = 100 mm Rotation: 360˚ continuous Tilt: -30˚ to +90˚
Specimen height	maximum 145 mm

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Product Focus

TIMA

The TESCAN Integrated Mineral Analyzer (TIMA) is a new SEM-based automated mineralogy solution for the mining and minerals processing industries. TIMA measures mineral abundance, size by size liberation, mineral association, grain size and PGM search automatically on multiple samples of grain mounts, thin sections or polished sections. Applications include ore characterization, process optimization, remediation and the search for precious metals and rare earths.

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