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VEGA-II XMU Variable
Pressure Scanning
Electron Microscope
The new VEGA-II XMU is the ultimate
state-of-the-art VPSEM, providing exceptional large sample handling
capabilities, as well as high performance backscattered and secondary
electron imaging at
chamber pressures up to 2000Pa with no specimen preparation.
Now available with Tescan's innovative new LVSTD
low vacuum secondary electron detector.
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Summary Specification |
| Electron
Optics |
4-lens Wide Field Optics™, Resolution,
Depth, Field, Wide-Field™, Electron Channeling, and Live 3D/Stereo Imaging Modes |
| Resolution |
3nm in High
vacuum mode
3.5nm in Low vacuum mode
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| Magnification |
3x - 500,000x |
| Accelerating
Voltage |
200V -
30kV, in 10V steps |
| Probe
Current |
1pA - 2uA |
| Scanning |
Scanning
speed adjustable from 160ns - 10ms per pixel, in steps or continuously |
| Image
Sizes |
Up to 8,192 x 8,192 pixels,
adjustable separately for live and store images; Selectable square and rectangular formats
(1:1, 3:4, and 1:2) |
| Microscope
Control and Automation |
Fully PC
controlled under Microsoft Windows™ XP Professional. Extensive automation of
SEM setup and control functions |
| Remote
Control |
Standard Remote Control and
Remote Diagnostics |
| Chamber |
300mm x
330mm Internal Dimensions |
| Specimen
Stage |
5-axis Fully Motorized
Compucentric stage, X=130mm, Y=130mm, Z=100mm, Rotation=360°
continuous, Tilt=-20° to +90° |
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