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VEGA-II XMH Scanning
Electron Microscope
The new VEGA-II XMH SEM provides
exceptional large sample handling, with the ability to fully image
samples over 7 inches in diameter and over 4 inches tall on a fully
automated compucentric stage!
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Summary Specification |
| Electron
Optics |
4-lens Wide Field Optics™, Resolution,
Depth, Field, Wide-Field™, Electron Channeling, and Live 3D/Stereo Imaging Modes |
| Resolution |
3nm |
| Magnification |
3x - 500,000x |
| Accelerating
Voltage |
200V -
30kV, in 10V steps |
| Probe
Current |
1pA - 2uA |
| Scanning |
Scanning
speed adjustable from 160ns - 10ms per pixel, in steps or continuously |
| Image
Sizes |
Up to 8,192 x 8,192 pixels,
adjustable separately for live and store images; Selectable square and rectangular formats
(1:1, 3:4, and 1:2) |
| Microscope
Control and Automation |
Fully PC
controlled under Microsoft Windows™ XP Professional. Extensive automation of
SEM setup and control functions |
| Remote
Control |
Standard Remote Control and
Remote Diagnostics |
| Chamber |
300mm x
330mm Internal Dimensions |
| Specimen
Stage |
5-axis Fully Motorized
Compucentric stage, X=130mm, Y=130mm, Z=100mm, Rotation=360°
continuous, Tilt=-20° to +90° |
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