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VEGA-II LMH Scanning
Electron Microscope
The VEGA-II LMH SEM provides high
performance 4-lens optics, extensive computer automation, a large
specimen chamber, and a fast,
precise 5-axis compucentric motorized stage
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Summary Specification |
| Electron
Optics |
4-lens Wide Field Optics™, Resolution,
Depth, Field, Wide-Field™, Electron Channeling, and Live 3D/Stereo Imaging Modes |
| Resolution |
3nm |
| Magnification |
4x - 500,000x |
| Accelerating
Voltage |
200V -
30kV, in 10V steps |
| Probe
Current |
1pA - 2uA |
| Scanning |
Scanning
speed adjustable from 160ns - 10ms per pixel, in steps or continuously |
| Image
Sizes |
Up to 8,192 x 8,192 pixels,
adjustable separately for live and store images; Selectable square and rectangular formats
(1:1, 3:4, 1:2) |
| Microscope
Control and Automation |
Fully PC
controlled under Microsoft Windows™ XP Professional. Extensive automation of
SEM setup and control functions |
| Remote
Control |
Standard Remote Control and
Remote Diagnostics |
| Chamber |
230mm
internal diameter, 11 Ports |
| Specimen
Stage |
5-axis Fully Motorized
Compucentric stage,
X=80mm, Y=60mm, Z=47mm, Rotation=360°
continuous, Tilt=-50° to +75° |
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