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MIRA-II XMU-IB
Schottky Field Emission Variable Pressure SEM
The MIRA-II XMU-IB Field Emission
VPSEM combines a high
performance Schottky Field Emitter and 3-lens Wide Field Optics™ with
Tescan's innovative new In-Beam Technology to provide exceptional
high
resolution imaging of large and heavy samples without requiring coating or sample
preparation
Now available with Tescan's innovative new LVSTD
low vacuum secondary electron detector.
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Summary Specification |
| Electron
Optics |
Schottky Field Emitter, 3-lens
Wide Field Optics™, Resolution with In-Beam Technology,
Depth, Field, Wide Field™, Electron Channeling, and Live 3D Imaging Modes |
| Resolution |
1nm in
Hi-vac mode (SE, 30kV) 1.5nm in Low-vac mode
(LVSTD, 30KV)
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| Magnification |
3x - 1,000,000x |
| Accelerating
Voltage |
200V -
30kV, in 10V steps |
| Probe
Current |
2pA - 40nA |
| Scanning |
Scanning
speed adjustable from 160ns - 10ms per pixel, in steps or continuously |
| Image
Sizes |
Up to 8,192 x 8,192 pixels,
adjustable separately for live and store images; Selectable square and rectangular formats
(1:1, 3:4, and 1:2) |
| Microscope
Control and Automation |
Fully PC
controlled under Microsoft Windows™ XP Professional. Extensive automation of
SEM setup and control functions |
| Remote
Control |
Standard Remote Control and
Remote Diagnostics |
| Chamber |
300mm x
330mm Internal Dimensions |
| Specimen
Stage |
5-axis Fully Motorized
Compucentric stage, X=130mm, Y=130mm, Z=100mm, Rotation=360°
continuous, Tilt=-20° to +90° |
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