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MIRA-II XMH-CS Schottky
Field Emission Scanning
Electron Microscope
The new MIRA-II XMH-CS Compact FESEM
combines a high performance Schottky Field Emitter and 3-lens Wide Field
Optics™ with exceptionally large sample handling
capability.
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Summary Specification |
| Electron
Optics |
Schottky Field Emitter, 3-lens
Wide Field Optics™, Resolution,
Depth, Field, Wide Field™, Electron Channeling, and Live 3D Imaging Modes |
| Resolution |
1.2nm at
30kV, 2.5nm at 3kV (SE) |
| Magnification |
3x - 1,000,000x |
| Accelerating
Voltage |
200V -
30kV, in 10V steps |
| Probe
Current |
2pA - 40nA |
| Scanning |
Scanning
speed adjustable from 160ns - 10ms per pixel, in steps or continuously |
| Image
Sizes |
Up to 8,192 x 8,192 pixels,
adjustable separately for live and store images; Selectable square and rectangular formats
(1:1, 3:4, and 1:2) |
| Microscope
Control and Automation |
Fully PC
controlled under Microsoft Windows™ XP Professional. Extensive automation of
SEM setup and control functions |
| Remote
Control |
Standard Remote Control and
Remote Diagnostics |
| Chamber |
300mm x
330mm Internal Dimensions |
| Specimen
Stage |
5-axis Fully Motorized
Compucentric stage, X=130mm, Y=130mm, Z=100mm, Rotation=360°
continuous, Tilt=-20° to +90° |
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