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MIRA-II LMH-IB Schottky
Field Emission Scanning
Electron Microscope
The MIRA-II LMH-IB FESEM combines a high
performance Schottky Field Emitter and 3-lens Wide Field Optics™ with
Tescan's innovative In-Beam Technology to provide exceptional
high resolution imaging
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Summary Specification |
| Electron
Optics |
Schottky Field Emitter, 3-lens
Wide Field Optics™ with In-Beam Technology, Resolution,
Depth, Field, Wide Field™, Electron Channeling, and Live 3D Imaging Modes |
| Resolution |
1nm at
30kV, 2nm at 3kV (SE) |
| Magnification |
4x - 1,000,000x |
| Accelerating
Voltage |
200V -
30kV, in 10V steps |
| Probe
Current |
2pA - 40nA |
| Scanning |
Scanning
speed adjustable from 160ns - 10ms per pixel, in steps or continuously |
| Image
Sizes |
Up to 8,192 x 8,192 pixels,
adjustable separately for live and store images; Selectable square and rectangular formats
(1:1, 3:4, 1:2) |
| Microscope
Control and Automation |
Fully PC
controlled under Microsoft Windows™ XP Professional. Extensive automation of
SEM setup and control functions |
| Remote
Control |
Standard Remote Control and
Remote Diagnostics |
| Chamber |
230mm
internal diameter, 11 Ports |
| Specimen
Stage |
5-axis Fully Motorized
Compucentric stage,
X=80mm, Y=60mm, Z=47mm, Rotation=360°
continuous, Tilt=-50° to +75° |
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