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Tescan's unique patented design
utilizes a standard Everhart-Thornley secondary electron detector
housed in a separately pumped detector chamber. This innovative design
keeps the SE detector under good vacuum and provides several benefits
over conventional VPSE detectors that rely on gas amplification (G-A)
effects:
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The LVSTD detector works very well
at all scan rates, including TV-rate - just like your normal
E-T secondary electron detector. VPSE detectors that rely on
G-A effects don't work well (or at all) at fast scan rates. |
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The LVSTD
detector behavior does not depend on gas pressure, allowing you to
optimize the pressure to suit your sample, not the detector. |
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G-A detector
efficiency is worst at the gas pressures that are optimum for VP
imaging. |
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The LVSTD
detector behavior is not sensitive to gas species, allowing you to
optimize the gas to suit your sample, not the detector |
University
of York LVSTD Poster presented at EMAG '03, Oxford, UK (right click to
download pdf, approx. 2MB) |
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| Comparison of BSE and VPSE
Images acquired with the Tescan LVSTD Detector - All samples
were imaged in their natural state (Click to enlarge) |
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Earwig
Claw imaged at 80Pa
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Automotive
Valve imaged at 80Pa.
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Carbon
film, only 3nm thick, deposited through a square grid onto a
silicon substrate, demonstrating true SE detection and
excellent surface contrast of the LVSTD detector.
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